Characterization of ALE-grown thin films

Lauri Niinistö

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationTKK-Tartu Ülikool 2nd ALE Symposium
    Place of PublicationTartu
    PublisherTartu Ülikool
    Publication statusPublished - 1993
    MoE publication typeA4 Conference publication

    Keywords

    • atomic layer epitaxy (ALE)
    • chemical composition
    • structure

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