Characterization of ALE-grown thin films

Lauri Niinistö

Characterization of ALE-grown thin films

Lauri Niinistö

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	TKK-Tartu Ülikool 2nd ALE Symposium
Place of Publication	Tartu
Publisher	TARTU ÜLIKOOL
Publication status	Published - 1993
MoE publication type	A4 Article in a conference publication

Keywords

atomic layer epitaxy (ALE)
chemical composition
structure

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@inproceedings{bb4c18fda1cd426a9abe335a57d7b418,

title = "Characterization of ALE-grown thin films",

keywords = "atomic layer epitaxy (ALE), chemical composition, structure, atomic layer epitaxy (ALE), chemical composition, structure, atomic layer epitaxy (ALE), chemical composition, structure",

author = "Lauri Niinist{\"o}",

year = "1993",

language = "English",

booktitle = "TKK-Tartu {\"U}likool 2nd ALE Symposium",

publisher = "TARTU {\"U}LIKOOL",

address = "Estonia",

}

TY - GEN

T1 - Characterization of ALE-grown thin films

AU - Niinistö, Lauri

PY - 1993

Y1 - 1993

KW - atomic layer epitaxy (ALE)

KW - chemical composition

KW - structure

KW - atomic layer epitaxy (ALE)

KW - chemical composition

KW - structure

KW - atomic layer epitaxy (ALE)

KW - chemical composition

KW - structure

M3 - Conference contribution

BT - TKK-Tartu Ülikool 2nd ALE Symposium

PB - TARTU ÜLIKOOL

CY - Tartu

ER -