Characterization and Gas-Sensing Properties of Iron Oxide Thin Films Prepared by Atomic Layer Deposition

Mikko Aronniemi, Jari Sainio, Jouko Lahtinen

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)6110-6115
JournalThin Solid Films
Volume516
Publication statusPublished - 2008
MoE publication typeA1 Journal article-refereed

Keywords

  • Atomic force microscopy
  • Atomic layer deposition
  • Gas sensor
  • Iron oxide
  • XPS

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