@article{b05d56c189154541b7ddbcd8852e50b6,
title = "Characterization and Gas-Sensing Properties of Iron Oxide Thin Films Prepared by Atomic Layer Deposition",
keywords = "Atomic force microscopy, Atomic layer deposition, Gas sensor, Iron oxide, XPS, Atomic force microscopy, Atomic layer deposition, Gas sensor, Iron oxide, XPS, Atomic force microscopy, Atomic layer deposition, Gas sensor, Iron oxide, XPS",
author = "Mikko Aronniemi and Jari Sainio and Jouko Lahtinen",
year = "2008",
language = "English",
volume = "516",
pages = "6110--6115",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier Science",
}