Cerium dioxide buffer layers at low temperature by atomic layer deposition

Jani Päiväsaari, Matti Putkonen, Lauri Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    63 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1828-1832
    JournalJournal of Materials Chemistry
    Volume12
    Publication statusPublished - 2002
    MoE publication typeA1 Journal article-refereed

    Keywords

    • atomic layer deposition
    • buffer layers
    • cerium dioxide
    • thin films

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