Fingerprint
Dive into the research topics of 'Cast Monocrystalline Silicon: New Alternative for Micro- and Nano-electromechanical Systems'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Cast Monocrystalline Silicon: New Alternative for Micro- and Nano-electromechanical Systems
Zhengjun Liu, Ville Vähänissi, Nikolai Chekurov, Ilkka Tittonen, Hele Savin
Research output: Contribution to journal › Article › Scientific › peer-review
259
Downloads
(Pure)