Carbon vacancy control in p⁺-n silicon carbide diodes for high voltage bipolar applications

Controlling the carbon vacancy (V-C) in silicon carbide (SiC) is one of the major remaining bottleneck in manufacturing of high voltage SiC bipolar devices, because V-C provokes recombination levels in the bandgap, offensively reducing the charge carrier lifetime. In literature, prominent V-C evolutions have been measured by capacitance spectroscopy employing Schottky diodes, however the trade-offs occurring in the p(+)-n diodes received much less attention. In the present work, applying similar methodology, we showed that V-C is re-generated to its unacceptably high equilibrium level at similar to 2 x10(13) V-C cm(-3) by 1800 degrees C anneals required for the implanted acceptor activation in the p(+)-n components. Nevertheless, we have also demonstrated that the V-C eliminating by thermodynamic equilibrium anneals at 1500 degrees C employing carbon-cap can be readily integrated into the p(+)-n components fabrication resulting in