Carbon film condensation from energetic ions

Juha-Pekka Hirvonen, Jari Koskinen, H. J. Scheibe

Research output: Contribution to conferencePaperScientific

Original languageEnglish
Number of pages26
Publication statusPublished - 1995
EventNational Symposium of the American Vacuum Society - Minneapolis, United States
Duration: 16 Oct 199520 Oct 1995
Conference number: 42

Conference

ConferenceNational Symposium of the American Vacuum Society
Country/TerritoryUnited States
CityMinneapolis
Period16/10/199520/10/1995

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