Capacitive Microphone with Low-stress Polysilicon Membrane and High-stress Polysilicon Backplate

Hannu Sipola; Heikki Seppä; J. Saarilahti; Outi Rusanen; Jarmo Hietanen

Capacitive Microphone with Low-stress Polysilicon Membrane and High-stress Polysilicon Backplate

Hannu Sipola, Heikki Seppä, J. Saarilahti, Outi Rusanen, Jarmo Hietanen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Eurosensors 13., The Hague, 12. - 15.9.1999
Editors	M. Bartek
Place of Publication	Delft
Publisher	Delft University of Technology
Pages	57-60
Publication status	Published - 1999
MoE publication type	A4 Conference publication

Keywords

capacitive
microphone
polysilicon
stress

Cite this

@inproceedings{0c2c8855b0f1430b94a13e454ec105a5,

title = "Capacitive Microphone with Low-stress Polysilicon Membrane and High-stress Polysilicon Backplate",

keywords = "capacitive, microphone, polysilicon, stress, capacitive, microphone, polysilicon, stress, capacitive, microphone, polysilicon, stress",

author = "Hannu Sipola and Heikki Sepp{\"a} and J. Saarilahti and Outi Rusanen and Jarmo Hietanen",

year = "1999",

language = "English",

pages = "57--60",

editor = "M. Bartek",

booktitle = "Eurosensors 13., The Hague, 12. - 15.9.1999",

publisher = "Delft University of Technology",

address = "Netherlands",

}

Capacitive Microphone with Low-stress Polysilicon Membrane and High-stress Polysilicon Backplate. / Sipola, Hannu; Seppä, Heikki; Saarilahti, J. et al.
Eurosensors 13., The Hague, 12. - 15.9.1999. ed. / M. Bartek. Delft: Delft University of Technology, 1999. p. 57-60.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Capacitive Microphone with Low-stress Polysilicon Membrane and High-stress Polysilicon Backplate

AU - Sipola, Hannu

AU - Seppä, Heikki

AU - Saarilahti, J.

AU - Rusanen, Outi

AU - Hietanen, Jarmo

PY - 1999

Y1 - 1999

KW - capacitive

KW - microphone

KW - polysilicon

KW - stress

KW - capacitive

KW - microphone

KW - polysilicon

KW - stress

KW - capacitive

KW - microphone

KW - polysilicon

KW - stress

M3 - Conference article in proceedings

SP - 57

EP - 60

BT - Eurosensors 13., The Hague, 12. - 15.9.1999

A2 - Bartek, M.

PB - Delft University of Technology

CY - Delft

ER -