Cadmium Telluride X-ray pad detectors with different passivation dielectrics

A. Gädda; J. Ott; A. Karadzhinova-Ferrer; M. Golovleva; M. Kalliokoski; A. Winkler; P. Luukka; J. Härkönen

doi:10.1016/j.nima.2018.08.063

Cadmium Telluride X-ray pad detectors with different passivation dielectrics

A. Gädda^*, J. Ott, A. Karadzhinova-Ferrer, M. Golovleva, M. Kalliokoski, A. Winkler, P. Luukka, J. Härkönen

^*Corresponding author for this work

Not published at Aalto University

Research output: Contribution to journal › Review Article › peer-review

7 Citations (Scopus)

Abstract

The suitability of two low-temperature dielectric passivation layer processes for the fabrication of Cadmium Telluride (CdTe) X-ray detectors has been investigated. The CdTe crystals with a size of (10×10×1)mm ³ were coated with sputtered aluminum nitride (AlN) or with aluminum oxide (Al ₂ O ₃ ) grown by the atomic layer deposition (ALD) method. The metallization contacts of the detectors were made by titanium tungsten (TiW) and gold (Au) metal sputtering depositions. The pad detector structures were patterned with proximity-contactless photolithography techniques followed by lift-off patterning of the electrodes. The detector properties were characterized at room temperature by Transient Current Technique (TCT) measurements. The obtained results were compared and verified by numerical TCAD simulations of the detector response. Our results indicate that higher signal charge was collected from samples with Al ₂ O ₃ . Furthermore, no significant laser light induced signal decay by CdTe material polarization was observed within order of 30 min of continuous illumination.

Original language	English
Pages (from-to)	33-37
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume	924
DOIs	https://doi.org/10.1016/j.nima.2018.08.063
Publication status	Published - 21 Apr 2019
MoE publication type	A2 Review article, Literature review, Systematic review

Keywords

Atomic layer deposition (ALD)
Cadmium Telluride (CdTe)
X-ray detector

Access to Document

10.1016/j.nima.2018.08.063

Cite this

Gädda, A., Ott, J., Karadzhinova-Ferrer, A., Golovleva, M., Kalliokoski, M., Winkler, A., Luukka, P., & Härkönen, J. (2019). Cadmium Telluride X-ray pad detectors with different passivation dielectrics. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 924, 33-37. https://doi.org/10.1016/j.nima.2018.08.063

@article{cc59bdff6ad64ed9885f315a6019b5b9,

title = "Cadmium Telluride X-ray pad detectors with different passivation dielectrics",

abstract = " The suitability of two low-temperature dielectric passivation layer processes for the fabrication of Cadmium Telluride (CdTe) X-ray detectors has been investigated. The CdTe crystals with a size of (10×10×1)mm 3 were coated with sputtered aluminum nitride (AlN) or with aluminum oxide (Al 2 O 3 ) grown by the atomic layer deposition (ALD) method. The metallization contacts of the detectors were made by titanium tungsten (TiW) and gold (Au) metal sputtering depositions. The pad detector structures were patterned with proximity-contactless photolithography techniques followed by lift-off patterning of the electrodes. The detector properties were characterized at room temperature by Transient Current Technique (TCT) measurements. The obtained results were compared and verified by numerical TCAD simulations of the detector response. Our results indicate that higher signal charge was collected from samples with Al 2 O 3 . Furthermore, no significant laser light induced signal decay by CdTe material polarization was observed within order of 30 min of continuous illumination. ",

keywords = "Atomic layer deposition (ALD), Cadmium Telluride (CdTe), X-ray detector",

author = "A. G{\"a}dda and J. Ott and A. Karadzhinova-Ferrer and M. Golovleva and M. Kalliokoski and A. Winkler and P. Luukka and J. H{\"a}rk{\"o}nen",

year = "2019",

month = apr,

day = "21",

doi = "10.1016/j.nima.2018.08.063",

language = "English",

volume = "924",

pages = "33--37",

journal = "Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment",

issn = "0168-9002",

publisher = "Elsevier",

}

Gädda, A, Ott, J, Karadzhinova-Ferrer, A, Golovleva, M, Kalliokoski, M, Winkler, A, Luukka, P & Härkönen, J 2019, 'Cadmium Telluride X-ray pad detectors with different passivation dielectrics', Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, vol. 924, pp. 33-37. https://doi.org/10.1016/j.nima.2018.08.063

Cadmium Telluride X-ray pad detectors with different passivation dielectrics. / Gädda, A.; Ott, J.; Karadzhinova-Ferrer, A. et al.
In: Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 924, 21.04.2019, p. 33-37.

Research output: Contribution to journal › Review Article › peer-review

TY - JOUR

T1 - Cadmium Telluride X-ray pad detectors with different passivation dielectrics

AU - Gädda, A.

AU - Ott, J.

AU - Karadzhinova-Ferrer, A.

AU - Golovleva, M.

AU - Kalliokoski, M.

AU - Winkler, A.

AU - Luukka, P.

AU - Härkönen, J.

PY - 2019/4/21

Y1 - 2019/4/21

N2 - The suitability of two low-temperature dielectric passivation layer processes for the fabrication of Cadmium Telluride (CdTe) X-ray detectors has been investigated. The CdTe crystals with a size of (10×10×1)mm 3 were coated with sputtered aluminum nitride (AlN) or with aluminum oxide (Al 2 O 3 ) grown by the atomic layer deposition (ALD) method. The metallization contacts of the detectors were made by titanium tungsten (TiW) and gold (Au) metal sputtering depositions. The pad detector structures were patterned with proximity-contactless photolithography techniques followed by lift-off patterning of the electrodes. The detector properties were characterized at room temperature by Transient Current Technique (TCT) measurements. The obtained results were compared and verified by numerical TCAD simulations of the detector response. Our results indicate that higher signal charge was collected from samples with Al 2 O 3 . Furthermore, no significant laser light induced signal decay by CdTe material polarization was observed within order of 30 min of continuous illumination.

AB - The suitability of two low-temperature dielectric passivation layer processes for the fabrication of Cadmium Telluride (CdTe) X-ray detectors has been investigated. The CdTe crystals with a size of (10×10×1)mm 3 were coated with sputtered aluminum nitride (AlN) or with aluminum oxide (Al 2 O 3 ) grown by the atomic layer deposition (ALD) method. The metallization contacts of the detectors were made by titanium tungsten (TiW) and gold (Au) metal sputtering depositions. The pad detector structures were patterned with proximity-contactless photolithography techniques followed by lift-off patterning of the electrodes. The detector properties were characterized at room temperature by Transient Current Technique (TCT) measurements. The obtained results were compared and verified by numerical TCAD simulations of the detector response. Our results indicate that higher signal charge was collected from samples with Al 2 O 3 . Furthermore, no significant laser light induced signal decay by CdTe material polarization was observed within order of 30 min of continuous illumination.

KW - Atomic layer deposition (ALD)

KW - Cadmium Telluride (CdTe)

KW - X-ray detector

UR - http://www.scopus.com/inward/record.url?scp=85052741684&partnerID=8YFLogxK

U2 - 10.1016/j.nima.2018.08.063

DO - 10.1016/j.nima.2018.08.063

M3 - Review Article

AN - SCOPUS:85052741684

SN - 0168-9002

VL - 924

SP - 33

EP - 37

JO - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

JF - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

ER -

Cadmium Telluride X-ray pad detectors with different passivation dielectrics

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this