Bulk-Aluminum Microfabrication for Micro Fuel Cells

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Original languageEnglish
Pages (from-to)372-379
Number of pages8
JournalJournal of Microelectromechanical Systems
Volume23
Issue number2
Publication statusPublished - Apr 2014
MoE publication typeA1 Journal article-refereed

    Research areas

  • Aluminum, hydrogen, micro fuel cell, micromachining, microfluidics, etching

ID: 904768