Bulk-Micromachined Silicon Microbridges for Infrared Emitters

Kestutis Grigoras, Tuuli Juvonen, Kaisa Nera, Paula Heikkilä, Sami Franssila

Research output: Working paperProfessional

Original languageEnglish
Publication statusPublished - 2001
MoE publication typeD4 Published development or research report or study

Publication series

NameMicromechanics Europe 2001, Cork, Ireland, September 16-18

Keywords

  • 111 silicon
  • emitter
  • etching
  • infrared
  • microbridge

Cite this

Grigoras, K., Juvonen, T., Nera, K., Heikkilä, P., & Franssila, S. (2001). Bulk-Micromachined Silicon Microbridges for Infrared Emitters. (Micromechanics Europe 2001, Cork, Ireland, September 16-18).