Bulk-Micromachined Silicon Microbridges for Infrared Emitters

Kestutis Grigoras, Tuuli Juvonen, Kaisa Nera, Paula Heikkilä, Sami Franssila

Research output: Working paperProfessional

Original languageEnglish
Publication statusPublished - 2001
MoE publication typeD4 Published development or research report or study

Publication series

NameMicromechanics Europe 2001, Cork, Ireland, September 16-18

Keywords

  • 111 silicon
  • emitter
  • etching
  • infrared
  • microbridge

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