Built-in Potentials Affecting the Stability of Micromechanical Systems

Mika Koskenvuori, Ville-Pekka Rytkönen, Pekka Rantakari, Ilkka Tittonen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationProceedings of the XXXIX Annual Conference of the Finnish Physical Society
EditorsTomi Ruokola, Juhani von Boehm
PublisherHelsinki University of Technology
ISBN (Print)951-22-7555-4
Publication statusPublished - 2005
MoE publication typeA4 Article in a conference publication
EventPhysics Days: Annual Meeting of the Finnish Physical Society - Espoo, Finland
Duration: 17 Mar 200519 Mar 2005
Conference number: 39

Publication series

NameReport / Helsinki University of Technology, Laboratory of Physics
PublisherHelsinki University of Technology
Number229
ISSN (Print)0359-6214

Conference

ConferencePhysics Days
CountryFinland
CityEspoo
Period17/03/200519/03/2005

Keywords

  • built-in potential
  • built-in voltage
  • micromechanics
  • stability

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