Building molecular surface gradients with electron beam lithography

Research output: Contribution to journalArticleScientificpeer-review

Researchers

  • Outi Toikkanen
  • Nguyet Doan
  • Mikhail Erdmanis
  • Harri Lipsanen

  • Kyösti Kontturi
  • Babak Parviz

Research units

  • University of Washington

Details

Original languageEnglish
Article number054025
Pages (from-to)1-5
Number of pages5
JournalJournal of Micromechanics and Microengineering
Volume21
Issue number5
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed

    Research areas

  • Nanolithography, Self-assembly

ID: 708540