Building molecular surface gradients with electron beam lithography

Outi Toikkanen; Nguyet Doan; Mikhail Erdmanis; Harri Lipsanen; Kyösti Kontturi; Babak Parviz

doi:10.1088/0960-1317/21/5/054025

Building molecular surface gradients with electron beam lithography

Outi Toikkanen
, Nguyet Doan
, Mikhail Erdmanis
, Harri Lipsanen
, Kyösti Kontturi
, Babak Parviz

Harri Lipsanen Group

University of Washington

Research output: Contribution to journal › Article › Scientific › peer-review

3 Citations (Scopus)

Original language	English
Article number	054025
Pages (from-to)	1-5
Number of pages	5
Journal	Journal of Micromechanics and Microengineering
Volume	21
Issue number	5
DOIs	https://doi.org/10.1088/0960-1317/21/5/054025
Publication status	Published - 2011
MoE publication type	A1 Journal article-refereed

Keywords

Nanolithography
Self-assembly

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10.1088/0960-1317/21/5/054025

Cite this

@article{d736462413af47a08a37448293f25268,

title = "Building molecular surface gradients with electron beam lithography",

keywords = "Nanolithography, Self-assembly, Nanolithography, Self-assembly, Nanolithography, Self-assembly",

author = "Outi Toikkanen and Nguyet Doan and Mikhail Erdmanis and Harri Lipsanen and Ky{\"o}sti Kontturi and Babak Parviz",

year = "2011",

doi = "10.1088/0960-1317/21/5/054025",

language = "English",

volume = "21",

pages = "1--5",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "Institute of Physics Publishing",

number = "5",

}

TY - JOUR

T1 - Building molecular surface gradients with electron beam lithography

AU - Toikkanen, Outi

AU - Doan, Nguyet

AU - Erdmanis, Mikhail

AU - Lipsanen, Harri

AU - Kontturi, Kyösti

AU - Parviz, Babak

PY - 2011

Y1 - 2011

KW - Nanolithography

KW - Self-assembly

KW - Nanolithography

KW - Self-assembly

KW - Nanolithography

KW - Self-assembly

UR - http://iopscience.iop.org/0960-1317/21/5/054025/

U2 - 10.1088/0960-1317/21/5/054025

DO - 10.1088/0960-1317/21/5/054025

M3 - Article

SN - 0960-1317

VL - 21

SP - 1

EP - 5

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 5

M1 - 054025

ER -

Building molecular surface gradients with electron beam lithography

Keywords

Access to Document

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