Building molecular surface gradients with electron beam lithography

Outi Toikkanen, Nguyet Doan, Mikhail Erdmanis, Harri Lipsanen, Kyösti Kontturi, Babak Parviz

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Article number054025
Pages (from-to)1-5
Number of pages5
JournalJournal of Micromechanics and Microengineering
Volume21
Issue number5
DOIs
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed

Keywords

  • Nanolithography
  • Self-assembly

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