Boron-implanted black silicon photodiode with close-to-ideal responsivity from 200 to 1000 nm

Olli Setälä^*, Kexun Chen, Toni Pasanen, Xiaolong Liu, Behrad Radfar, Ville Vähänissi, Hele Savin

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

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-: Photonics Research and Innovation
Savin, H. (Principal investigator), Liu, X. (Project Member), Radfar, B. (Project Member), Vähänissi, V. (Project Member) & Yli-Koski, M. (Project Member)
01/09/2022 → 31/12/2026
Project: Academy of Finland: Other research funding