Boron-implanted black silicon photodiode with close-to-ideal responsivity from 200 to 1000 nm

Olli Setälä*, Kexun Chen, Toni Pasanen, Xiaolong Liu, Behrad Radfar, Ville Vähänissi, Hele Savin

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

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