Blistering effect in ALD Al2O3 thin films grown with timethylaluminum and water

Maria Berdova, Ville Rontu, Timo Sajavaara, Antti-Pekka Eskelinen, Sami Franssila

Research output: Contribution to conferencePaperScientific

Equipment

OtaNano

Anna Rissanen (Manager)

Aalto University

Facility/equipment: Facility