Original language | English |
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Publication status | Published - 12 May 2014 |
MoE publication type | Not Eligible |
Event | International Baltic Conference on Atomic Layer Deposition - Helsinki, Finland Duration: 12 May 2014 → 13 May 2014 Conference number: 12 |
Conference
Conference | International Baltic Conference on Atomic Layer Deposition |
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Abbreviated title | Baltic ALD |
Country/Territory | Finland |
City | Helsinki |
Period | 12/05/2014 → 13/05/2014 |
Equipment
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OtaNano - Nanomicroscopy Center
Seitsonen, J. (Manager) & Rissanen, A. (Other)
OtaNanoFacility/equipment: Facility