Blistering effect in ALD Al2O3 thin films grown with timethylaluminum and water

Maria Berdova, Ville Rontu, Timo Sajavaara, Antti-Pekka Eskelinen, Sami Franssila

Research output: Contribution to conference › Paper › Scientific

Original language	English
Publication status	Published - 12 May 2014
MoE publication type	Not Eligible
Event	International Baltic Conference on Atomic Layer Deposition - Helsinki, Finland Duration: 12 May 2014 → 13 May 2014 Conference number: 12

Conference	International Baltic Conference on Atomic Layer Deposition
Abbreviated title	Baltic ALD
Country/Territory	Finland
City	Helsinki
Period	12/05/2014 → 13/05/2014

OtaNano
Rissanen, A. (Manager)
Aalto University
Facility/equipment: Facility
OtaNano - Nanofab
Repo, P. (Manager) & Rissanen, A. (Other)
OtaNano
Facility/equipment: Facility
OtaNano - Nanomicroscopy Center
Seitsonen, J. (Manager) & Rissanen, A. (Other)
OtaNano
Facility/equipment: Facility

Cite this

@conference{150f2acf12e345d7839f6c9fee8b61d6,

title = "Blistering effect in ALD Al2O3 thin films grown with timethylaluminum and water",

author = "Maria Berdova and Ville Rontu and Timo Sajavaara and Antti-Pekka Eskelinen and Sami Franssila",

year = "2014",

month = may,

day = "12",

language = "English",

note = "International Baltic Conference on Atomic Layer Deposition, Baltic ALD ; Conference date: 12-05-2014 Through 13-05-2014",

}

TY - CONF

T1 - Blistering effect in ALD Al2O3 thin films grown with timethylaluminum and water

AU - Berdova, Maria

AU - Rontu, Ville

AU - Sajavaara, Timo

AU - Eskelinen, Antti-Pekka

AU - Franssila, Sami

N1 - Conference code: 12

PY - 2014/5/12

Y1 - 2014/5/12

M3 - Paper

T2 - International Baltic Conference on Atomic Layer Deposition

Y2 - 12 May 2014 through 13 May 2014

ER -