Blistering effect in ALD Al2O3 thin films grown with timethylaluminum and water

Maria Berdova, Ville Rontu, Timo Sajavaara, Antti-Pekka Eskelinen, Sami Franssila

Research output: Contribution to conference › Paper › Scientific

Original language	English
Publication status	Published - 12 May 2014
MoE publication type	Not Eligible
Event	International Baltic Conference on Atomic Layer Deposition - Helsinki, Finland Duration: 12 May 2014 → 13 May 2014 Conference number: 12

Conference	International Baltic Conference on Atomic Layer Deposition
Abbreviated title	Baltic ALD
Country	Finland
City	Helsinki
Period	12/05/2014 → 13/05/2014

Equipment

Facility/equipment: Facility

Facility/equipment: Facility

Facility/equipment: Facility

Berdova, M., Rontu, V., Sajavaara, T., Eskelinen, A-P., & Franssila, S. (2014). Blistering effect in ALD Al2O3 thin films grown with timethylaluminum and water. Paper presented at International Baltic Conference on Atomic Layer Deposition, Helsinki, Finland.

@conference{150f2acf12e345d7839f6c9fee8b61d6,

title = "Blistering effect in ALD Al2O3 thin films grown with timethylaluminum and water",

author = "Maria Berdova and Ville Rontu and Timo Sajavaara and Antti-Pekka Eskelinen and Sami Franssila",

year = "2014",

month = "5",

day = "12",

language = "English",

note = "International Baltic Conference on Atomic Layer Deposition, Baltic ALD ; Conference date: 12-05-2014 Through 13-05-2014",

}