Blistering effect in ALD Al2O3 thin films grown with timethylaluminum and water

Maria Berdova, Ville Rontu, Timo Sajavaara, Antti-Pekka Eskelinen, Sami Franssila

Research output: Contribution to conferencePaperScientific

Original languageEnglish
Publication statusPublished - 12 May 2014
MoE publication typeNot Eligible
EventInternational Baltic Conference on Atomic Layer Deposition - Helsinki, Finland
Duration: 12 May 201413 May 2014
Conference number: 12

Conference

ConferenceInternational Baltic Conference on Atomic Layer Deposition
Abbreviated titleBaltic ALD
CountryFinland
CityHelsinki
Period12/05/201413/05/2014

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