Black silicon significantly enhances phosphorus diffusion gettering

Toni P. Pasanen, Hannu Laine, Ville Vähänissi, Jonas Schön, Hele Savin

Research output: Contribution to journal › Article › Scientific › peer-review

22 Citations (Scopus)

167 Downloads (Pure)

17th Conference on Gettering and Defect Engineering in Semiconductors (Telavi, Georgia): Enhanced iron gettering with black silicon
Toni Pasanen (Contributor), Hannu Laine (Contributor), Ville Vähänissi (Contributor), Jonas Schön (Contributor) & Hele Savin (Invited speaker)
3 Oct 2017
Activity: Talk or presentation types › Invited academic talk
2017 Materials Research Society MRS Conference (Boston, USA): Enhanced iron gettering with black silicon
Toni Pasanen (Contributor), Hannu Laine (Contributor), Ville Vähänissi (Contributor), Jonas Schön (Contributor) & Hele Savin (Invited speaker)
29 Nov 2017
Activity: Talk or presentation types › Invited academic talk

Activities