Black Silicon

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

Original languageEnglish
Title of host publicationHandbook of Silicon Based MEMS Materials and Technologies
PublisherElsevier
Chapter6.6
Pages186-196
Edition3
ISBN (Electronic)9780128177877
ISBN (Print)9780128177860
DOIs
Publication statusPublished - 24 Apr 2020
MoE publication typeA3 Part of a book or another research book

Publication series

NameMicro & Nano Technologies

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