Black Silicon

Toni Pasanen

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific › peer-review

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Original language	English
Title of host publication	Handbook of Silicon Based MEMS Materials and Technologies
Publisher	Elsevier
Chapter	6.6
Pages	186-196
Edition	3
ISBN (Electronic)	9780128177877
ISBN (Print)	9780128177860
DOIs	https://doi.org/10.1016/B978-0-12-817786-0.00006-2
Publication status	Published - 24 Apr 2020
MoE publication type	A3 Book section, Chapters in research books

Name	Micro & Nano Technologies

Access to Document

@inbook{313559de629a4183944ed4f97c35ece3,

title = "Black Silicon",

author = "Toni Pasanen",

year = "2020",

month = apr,

day = "24",

doi = "10.1016/B978-0-12-817786-0.00006-2",

language = "English",

isbn = "9780128177860",

series = "Micro & Nano Technologies",

publisher = "Elsevier",

pages = "186--196",

booktitle = "Handbook of Silicon Based MEMS Materials and Technologies",

address = "Netherlands",

edition = "3",

}