| Original language | English |
|---|---|
| Journal | Chemical Vapor Deposition |
| Volume | 14 |
| Issue number | 3-4 |
| DOIs | |
| Publication status | Published - 2008 |
| MoE publication type | A1 Journal article-refereed |
Bis(tert-butylimido)-bis(dialkylamido) complexes of molybdenum as atomic layer deposition (ALD) precursors for molybdenum nitride: The effect of the alkyl group
V. Miikkulainen, Mika Suvanto, Tapani A. Pakkanen
Research output: Contribution to journal › Article › Scientific › peer-review
26
Citations
(Scopus)