Benzenedisulfonic Acid as an ALD/MLD Building Block for Crystalline Metal-Organic Thin Films**

Juho Heiska; Olli Sorsa; Tanja Kallio; Maarit Karppinen

doi:10.1002/chem.202100538

Benzenedisulfonic Acid as an ALD/MLD Building Block for Crystalline Metal-Organic Thin Films**

Juho Heiska, Olli Sorsa, Tanja Kallio, Maarit Karppinen^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

8 Citations (Scopus)

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Abstract

** ALD=atomic layer deposition; MLD=molecular layer deposition.

Two new atomic/molecular layer deposition processes for depositing crystalline metal-organic thin films, built from 1,4-benzenedisulfonate (BDS) as the organic linker and Cu or Li as the metal node, are reported. The processes yield in-situ crystalline but hydrated Cu-BDS and Li-BDS films; in the former case, the crystal structure is of a previously known metal-organic-framework-like structure, while in the latter case not known from previous studies. Both hydrated materials can be readily dried to obtain the crystalline unhydrated phases. The stability and the ionic conductivity of the unhydrated Li-BDS films were characterized to assess their applicability as a thin film solid polymer Li-ion conductor.

Original language	English
Pages (from-to)	8799-8803
Number of pages	5
Journal	Chemistry: A European Journal
Volume	27
Issue number	34
Early online date	5 May 2021
DOIs	https://doi.org/10.1002/chem.202100538
Publication status	Published - 16 Jun 2021
MoE publication type	A1 Journal article-refereed

Keywords

atomic layer deposition
metal-organic frameworks
molecular layer deposition
solid electrolyte
sulfonate

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10.1002/chem.202100538Licence: CC BY-NC-ND

CHEM_Heiska_et_al_Benzenedisulfonic_Acid_2021_Chemistry_A_European_JournalFinal published version, 1.67 MBLicence: CC BY-NC-ND

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@article{96a47dc6b13543639f0e92e877811f63,

title = "Benzenedisulfonic Acid as an ALD/MLD Building Block for Crystalline Metal-Organic Thin Films**",

abstract = "** ALD=atomic layer deposition; MLD=molecular layer deposition.Two new atomic/molecular layer deposition processes for depositing crystalline metal-organic thin films, built from 1,4-benzenedisulfonate (BDS) as the organic linker and Cu or Li as the metal node, are reported. The processes yield in-situ crystalline but hydrated Cu-BDS and Li-BDS films; in the former case, the crystal structure is of a previously known metal-organic-framework-like structure, while in the latter case not known from previous studies. Both hydrated materials can be readily dried to obtain the crystalline unhydrated phases. The stability and the ionic conductivity of the unhydrated Li-BDS films were characterized to assess their applicability as a thin film solid polymer Li-ion conductor.",

keywords = "atomic layer deposition, metal-organic frameworks, molecular layer deposition, solid electrolyte, sulfonate",

author = "Juho Heiska and Olli Sorsa and Tanja Kallio and Maarit Karppinen",

note = "Funding Information: The authors would like to thank the Academy of Finland (Profi 3 and 5 projects) and the European Union's Horizon 2020 research and innovation program under grant agreement CREATE No. 721065 for funding this work. This study made use of RawMatTERS Finland Infrastructure (Aalto – RAMI). Publisher Copyright: {\textcopyright} 2021 The Authors. Chemistry - A European Journal published by Wiley-VCH GmbH Copyright: Copyright 2021 Elsevier B.V., All rights reserved.",

year = "2021",

month = jun,

day = "16",

doi = "10.1002/chem.202100538",

language = "English",

volume = "27",

pages = "8799--8803",

journal = "Chemistry: A European Journal",

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TY - JOUR

T1 - Benzenedisulfonic Acid as an ALD/MLD Building Block for Crystalline Metal-Organic Thin Films**

AU - Heiska, Juho

AU - Sorsa, Olli

AU - Kallio, Tanja

AU - Karppinen, Maarit

N1 - Funding Information: The authors would like to thank the Academy of Finland (Profi 3 and 5 projects) and the European Union's Horizon 2020 research and innovation program under grant agreement CREATE No. 721065 for funding this work. This study made use of RawMatTERS Finland Infrastructure (Aalto – RAMI). Publisher Copyright: © 2021 The Authors. Chemistry - A European Journal published by Wiley-VCH GmbH Copyright: Copyright 2021 Elsevier B.V., All rights reserved.

PY - 2021/6/16

Y1 - 2021/6/16

N2 - ** ALD=atomic layer deposition; MLD=molecular layer deposition.Two new atomic/molecular layer deposition processes for depositing crystalline metal-organic thin films, built from 1,4-benzenedisulfonate (BDS) as the organic linker and Cu or Li as the metal node, are reported. The processes yield in-situ crystalline but hydrated Cu-BDS and Li-BDS films; in the former case, the crystal structure is of a previously known metal-organic-framework-like structure, while in the latter case not known from previous studies. Both hydrated materials can be readily dried to obtain the crystalline unhydrated phases. The stability and the ionic conductivity of the unhydrated Li-BDS films were characterized to assess their applicability as a thin film solid polymer Li-ion conductor.

AB - ** ALD=atomic layer deposition; MLD=molecular layer deposition.Two new atomic/molecular layer deposition processes for depositing crystalline metal-organic thin films, built from 1,4-benzenedisulfonate (BDS) as the organic linker and Cu or Li as the metal node, are reported. The processes yield in-situ crystalline but hydrated Cu-BDS and Li-BDS films; in the former case, the crystal structure is of a previously known metal-organic-framework-like structure, while in the latter case not known from previous studies. Both hydrated materials can be readily dried to obtain the crystalline unhydrated phases. The stability and the ionic conductivity of the unhydrated Li-BDS films were characterized to assess their applicability as a thin film solid polymer Li-ion conductor.

KW - atomic layer deposition

KW - metal-organic frameworks

KW - molecular layer deposition

KW - solid electrolyte

KW - sulfonate

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U2 - 10.1002/chem.202100538

DO - 10.1002/chem.202100538

M3 - Article

AN - SCOPUS:85105333389

SN - 0947-6539

VL - 27

SP - 8799

EP - 8803

JO - Chemistry: A European Journal

JF - Chemistry: A European Journal

IS - 34

ER -

Benzenedisulfonic Acid as an ALD/MLD Building Block for Crystalline Metal-Organic Thin Films**

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Benzenedisulfonic Acid as an ALD/MLD Building Block for Crystalline Metal-Organic Thin Films**

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