Beneq Oy, University of Jyväskylä and University of Helsinki Effects of ALD TiN on the Abrasion Resistance of Three Stainless Steel Grades

Ville Malinen; Matti Putkonen; T. Sajavaara; M. Kemell; E. Puukilainen; M. Ritala; M. Leskelä

Beneq Oy, University of Jyväskylä and University of Helsinki Effects of ALD TiN on the Abrasion Resistance of Three Stainless Steel Grades

Ville Malinen
, Matti Putkonen
, T. Sajavaara
, M. Kemell
, E. Puukilainen
, M. Ritala
, M. Leskelä

Research output: Working paper › Professional

Original language	English
Publication status	Published - 2009
MoE publication type	D4 Published development or research report or study

Publication series

Name	ALD 2009 conference, Portola Hotel & Spa, Monterey, California, July 19-22, 2009

Cite this

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title = "Beneq Oy, University of Jyv{\"a}skyl{\"a} and University of Helsinki Effects of ALD TiN on the Abrasion Resistance of Three Stainless Steel Grades",

author = "Ville Malinen and Matti Putkonen and T. Sajavaara and M. Kemell and E. Puukilainen and M. Ritala and M. Leskel{\"a}",

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language = "English",

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T1 - Beneq Oy, University of Jyväskylä and University of Helsinki Effects of ALD TiN on the Abrasion Resistance of Three Stainless Steel Grades

AU - Malinen, Ville

AU - Putkonen, Matti

AU - Sajavaara, T.

AU - Kemell, M.

AU - Puukilainen, E.

AU - Ritala, M.

AU - Leskelä, M.

PY - 2009

Y1 - 2009

M3 - Working paper

T3 - ALD 2009 conference, Portola Hotel & Spa, Monterey, California, July 19-22, 2009

BT - Beneq Oy, University of Jyväskylä and University of Helsinki Effects of ALD TiN on the Abrasion Resistance of Three Stainless Steel Grades

ER -