@inproceedings{7ffc42d33b364281847eff7ba5c88e3b,
title = "Atomistic simulations of surface coverage effects in anisotropic wet chemical etching of crystalline silicon",
keywords = "anisotropic wet chemical etching, cellular automaton, surface coverage, surface termination, anisotropic wet chemical etching, cellular automaton, surface coverage, surface termination, anisotropic wet chemical etching, cellular automaton, surface coverage, surface termination",
author = "Miguel Gos{\'a}lvez and Adam Foster and Risto Nieminen",
year = "2002",
language = "English",
pages = "37--40",
editor = "K. Sato",
booktitle = "3rd Workshop on Physical Chemistry of Wet Etching of Silicon, Nara, Japan, June 4-6, 2002",
}