Atomic/molecular layer deposition of Ti-organic thin films from different aromatic alcohol and amine precursors

Anne Tanskanen, Pia Sundberg, Michael Nolan, Maarit Karppinen*

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)
112 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Atomic/molecular layer deposition of Ti-organic thin films from different aromatic alcohol and amine precursors'. Together they form a unique fingerprint.

Chemistry

Physics

Material Science

Chemical Engineering

Computer Science