Atomic/molecular layer deposition of hybrid inorganic–organic thin films from erbium guanidinate precursor

Research output: Contribution to journalArticle


  • Lukas Mai
  • Zivile Giedraityte
  • Marcel Schmidt
  • Detlef Rogalla
  • Sven Scholz
  • Andreas D. Wieck
  • Anjana Devi
  • Maarit Karppinen

Research units

  • Ruhr University Bochum


Luminescent erbium-based inorganic–organic hybrid materials play an important role in many frontier nano-sized applications, such as amplifiers, detectors and OLEDs. Here, we demonstrate the possibility to fabricate high-quality thin films comprising both erbium and an appropriate organic molecule as a luminescence sensitizer utilizing the combined atomic layer deposition and molecular layer deposition (ALD/MLD) technique. We employ tris(N,N′-diisopropyl-2-dimethylamido guanidinato)erbium(III) [Er(DPDMG)3] together with 3,5-pyridine dicarboxylic acid as precursors. With the appreciably high film deposition rate achieved (6.4 Å cycle−1), the guanidinate precursor indeed appears as an interesting new addition to the ALD/MLD precursor variety toward novel materials. Our erbium–organic thin films showed highly promising UV absorption properties and a photoluminescence at 1535 nm for a 325-nm excitation, relevant to possible future luminescence applications.


Original languageEnglish
Pages (from-to)6216-6224
Number of pages9
JournalJournal of Materials Science
Issue number11
Publication statusPublished - Jun 2017
MoE publication typeA1 Journal article-refereed

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