Atomic layer etching of gallium nitride (0001)

Christoffer Kauppinen, Sabbir Ahmed Khan, Jonas Sundqvist, Dmitry B. Suyatin, Sami Suihkonen, Esko I. Kauppinen, Markku Sopanen

Research output: Contribution to journalArticleScientificpeer-review

21 Citations (Scopus)
763 Downloads (Pure)

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