Atomic layer epitaxy in the growth of complex thin film structures for electroluminescent applications

L. Niinistö, M. Leskelä

    Research output: Contribution to journalArticleScientificpeer-review

    12 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)454-459
    JournalApplied Surface Science
    Volume82/83
    Publication statusPublished - 1994
    MoE publication typeA1 Journal article-refereed

    Keywords

    • Atomic layer epitaxy
    • complex structures
    • electroluminescent
    • thin film

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