Atomic layer epitaxy: Chemical opportunities and challenges

L. Niinistö, M. Leskelä

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    35 Citations (Scopus)
    Original languageEnglish
    Title of host publication2nd International Symposium on Atomic Layer Epitaxy, Raleigh, USA, 1992
    Place of PublicationRaleigh, USA
    PagesD-3
    Publication statusPublished - 1992
    MoE publication typeA4 Article in a conference publication

    Keywords

    • atomic layer epitaxy (ALE)

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