Atomic layer epitaxy: Chemical opportunities and challenges

L. Niinistö, M. Leskelä

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

35 Citations (Scopus)

Original language	English
Title of host publication	2nd International Symposium on Atomic Layer Epitaxy, Raleigh, USA, 1992
Place of Publication	Raleigh, USA
Pages	D-3
Publication status	Published - 1992
MoE publication type	A4 Article in a conference publication

Keywords

@inproceedings{e17f6a43a8c04916b41c8f9079132cf7,

title = "Atomic layer epitaxy: Chemical opportunities and challenges",

keywords = "atomic layer epitaxy (ALE), atomic layer epitaxy (ALE), atomic layer epitaxy (ALE)",

author = "L. Niinist{\"o} and M. Leskel{\"a}",

year = "1992",

language = "English",

pages = "D--3",

booktitle = "2nd International Symposium on Atomic Layer Epitaxy, Raleigh, USA, 1992",

}