@article{7ac40061974d4037bea68622af0d6367,
title = "Atomic layer epitaxy: chemical opportunities and challenges",
keywords = "atomic layer epitaxy (ALE), mechanisms, review, source materials, thin films, atomic layer epitaxy (ALE), mechanisms, review, source materials, thin films, atomic layer epitaxy (ALE), mechanisms, review, source materials, thin films",
author = "L. Niinist{\"o} and M. Leskel{\"a}",
year = "1993",
language = "English",
volume = "225",
pages = "130--135",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier Science",
}