Atomic layer epitaxy: chemical opportunities and challenges

L. Niinistö, M. Leskelä

    Research output: Contribution to journalArticleScientificpeer-review

    35 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)130-135
    JournalThin Solid Films
    Volume225
    Publication statusPublished - 1993
    MoE publication typeA1 Journal article-refereed

    Keywords

    • atomic layer epitaxy (ALE)
    • mechanisms
    • review
    • source materials
    • thin films

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