Atomic layer deposition spreads around the world (In Finnish)

Lauri Niinistö

Research output: Contribution to journal › Article › Professional

Keywords

@article{49a5f5ac4be143f28b008521a477a880,

title = "Atomic layer deposition spreads around the world (In Finnish)",

keywords = "ALD, AVS, BALD, conference, ALD, AVS, BALD, conference, ALD, AVS, BALD, conference",

author = "Lauri Niinist{\"o}",

year = "2004",

language = "Suomi",

volume = "31",

pages = "36--37",

journal = "Kemia - Kemi",

issn = "2670-3521",

number = "7",

}