Atomic layer deposition of ytterbium oxide using ß-diketonate and ozone precursors

Research output: Contribution to journalArticle


  • M. Bosund
  • K. Mizohata
  • T. Hakkarainen
  • Matti Putkonen
  • M. Söderlund
  • S. Honkanen
  • Harri Lipsanen

Research units

  • University of Helsinki
  • Beneq Oy


Original languageEnglish
Pages (from-to)847-851
Number of pages5
JournalApplied Surface Science
Issue number3
Publication statusPublished - 15 Nov 2009
MoE publication typeA1 Journal article-refereed

    Research areas

  • atomic layer deposition, Refractive index, TOF-ERDA, X-ray diffraction, X-ray reflectivity, ytterbium oxide

ID: 2408524