@article{707974febaac4ef5a14593d80dcf9966,
title = "Atomic layer deposition of ytterbium oxide using {\ss}-diketonate and ozone precursors",
keywords = "atomic layer deposition, Refractive index, TOF-ERDA, X-ray diffraction, X-ray reflectivity, ytterbium oxide, atomic layer deposition, Refractive index, TOF-ERDA, X-ray diffraction, X-ray reflectivity, ytterbium oxide, atomic layer deposition, Refractive index, TOF-ERDA, X-ray diffraction, X-ray reflectivity, ytterbium oxide",
author = "M. Bosund and K. Mizohata and T. Hakkarainen and Matti Putkonen and M. S{\"o}derlund and S. Honkanen and H. Lipsanen",
year = "2009",
month = nov,
day = "15",
doi = "10.1016/j.apsusc.2009.08.073",
language = "English",
volume = "256",
pages = "847--851",
journal = "Applied Surface Science",
issn = "0169-4332",
publisher = "Elsevier",
number = "3",
}