Atomic layer deposition of ytterbium oxide using ß-diketonate and ozone precursors

M. Bosund, K. Mizohata, T. Hakkarainen, Matti Putkonen, M. Söderlund, S. Honkanen, H. Lipsanen

    Research output: Contribution to journalArticleScientificpeer-review

    19 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)847-851
    Number of pages5
    JournalApplied Surface Science
    Issue number3
    Publication statusPublished - 15 Nov 2009
    MoE publication typeA1 Journal article-refereed


    • atomic layer deposition
    • Refractive index
    • TOF-ERDA
    • X-ray diffraction
    • X-ray reflectivity
    • ytterbium oxide

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