Atomic layer deposition of tungsten carbonitride thin films from a new metalorganic precursor

Charles L. Dezelah, Osama M. El-Kadri, Mary Jane Heeg, Lauri Niinistö, Charles H. Winter

    Research output: Contribution to journalArticleScientificpeer-review

    5 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)563-574
    JournalProceedings of the Electrochemical Society
    Volume2005-09
    Publication statusPublished - 2005
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ALD
    • amidinate precursor
    • thin films

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