Atomic layer deposition of thin aluminium oxide films for carbon nanotube based transitors

M.Y Zavodchikova, A.G Nasibulin, K. Grigoras, E.I Kauppinen, V. Ermolov, S. Franssila

    Research output: Working paperProfessional

    Original languageEnglish
    Publication statusPublished - 2009
    MoE publication typeD4 Published development or research report or study

    Publication series

    Name4th International Conference on Surfaces, Coatings and Nanostructured Materials, Rome, Italy, Oct 19-22

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