Atomic layer deposition of rare earth oxides:erbium oxide thin films from beta-diketonate and ozone precursors

Jani Päiväsaari, Matti Putkonen, Timo Sajavaara, Lauri Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    62 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)124-128
    JournalJournal of Alloys and Compounds
    Volume374
    Publication statusPublished - 2004
    MoE publication typeA1 Journal article-refereed

    Keywords

    • atomic layer deposition
    • beta-diketonate precursor
    • erbium oxide
    • rare earth oxides
    • thin films

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