Atomic layer deposition of rare earth oxides: erbium oxide films from b-diketonate and ozone precursors

Research output: Working paper › Professional

Original language	English
Place of Publication	Helsinki
Publication status	Published - 2004
MoE publication type	D4 Published development or research report or study

Name	AVS Topical Conference on atomic layer deposition (ALD 2004)
Publisher	American Vacuum Society (AVS)

Cite this

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title = "Atomic layer deposition of rare earth oxides: erbium oxide films from b-diketonate and ozone precursors",

author = "Jani P{\"a}iv{\"a}saari and Jaakko Niinist{\"o} and Matti Putkonen and Lauri Niinist{\"o}",

year = "2004",

language = "English",

series = "AVS Topical Conference on atomic layer deposition (ALD 2004)",

publisher = "American Vacuum Society (AVS)",

type = "WorkingPaper",

institution = "American Vacuum Society (AVS)",

}

TY - UNPB

T1 - Atomic layer deposition of rare earth oxides: erbium oxide films from b-diketonate and ozone precursors

AU - Päiväsaari, Jani

AU - Niinistö, Jaakko

AU - Putkonen, Matti

AU - Niinistö, Lauri

PY - 2004

Y1 - 2004

M3 - Working paper

T3 - AVS Topical Conference on atomic layer deposition (ALD 2004)

BT - Atomic layer deposition of rare earth oxides: erbium oxide films from b-diketonate and ozone precursors

CY - Helsinki

ER -