Atomic layer deposition of rare earth oxides: erbium oxide films from b-diketonate and ozone precursors

Jani Päiväsaari, Jaakko Niinistö, Matti Putkonen, Lauri Niinistö

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationHelsinki
    Publication statusPublished - 2004
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameAVS Topical Conference on atomic layer deposition (ALD 2004)
    PublisherAmerican Vacuum Society (AVS)

    Cite this

    Päiväsaari, J., Niinistö, J., Putkonen, M., & Niinistö, L. (2004). Atomic layer deposition of rare earth oxides: erbium oxide films from b-diketonate and ozone precursors. (AVS Topical Conference on atomic layer deposition (ALD 2004)).