Original language | English |
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Pages (from-to) | 15-32 |
Journal | TOPICS IN APPLIED PHYSICS |
Volume | 106 |
Publication status | Published - 2007 |
MoE publication type | A1 Journal article-refereed |
Atomic Layer Deposition of Rare Earth Oxides
Jani Päiväsaari, Jaakko Niinistö, Pia Myllymäki, Charles Dezelah IV, Charles H. Winter, Matti Putkonen, Minna Nieminen, Lauri Niinistö
Research output: Contribution to journal › Article › Scientific › peer-review
30
Citations
(Scopus)