Atomic Layer Deposition of Rare Earth Oxides

Jani Päiväsaari, Jaakko Niinistö, Pia Myllymäki, Charles Dezelah IV, Charles H. Winter, Matti Putkonen, Minna Nieminen, Lauri Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    25 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)15-32
    JournalTOPICS IN APPLIED PHYSICS
    Volume106
    Publication statusPublished - 2007
    MoE publication typeA1 Journal article-refereed

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