@techreport{ba3bac2a0fa14efcb09dace2260599ed,
title = "Atomic Layer Deposition of Rare Earth Oxide Thin Films Exploiting Different Precursor Chemistries",
keywords = "atomic layer deposition, rare earth oxide, thin film, atomic layer deposition, rare earth oxide, thin film, atomic layer deposition, rare earth oxide, thin film",
author = "Lauri Niinist{\"o} and Matti Putkonen and Jani P{\"a}iv{\"a}saari and Jaakko Niinist{\"o} and Anne Kosola and Minna Nieminen and Dezellah, \{Charles L.\} and Winter, \{Charles H.\}",
year = "2005",
language = "English",
series = "4th Rare Earth Research Conference, Keystone, Colorado, USA, 26-30.6. 2005",
type = "WorkingPaper",
}