Original language | English |
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Pages (from-to) | 664-669 |
Journal | Journal of Materials Chemistry |
Volume | 17 |
Issue number | 7 |
Publication status | Published - 2007 |
MoE publication type | A1 Journal article-refereed |
Atomic layer deposition of polyimide thin films
Matti Putkonen, Jenni Harjuoja, Timo Sajavaara, Lauri Niinistö
Research output: Contribution to journal › Article › Scientific › peer-review
102
Citations
(Scopus)