Atomic layer deposition of polyimide thin films

Matti Putkonen, Jenni Harjuoja, Timo Sajavaara, Lauri Niinistö

Research output: Contribution to journal › Article › Scientific › peer-review

102 Citations (Scopus)

Original language	English
Pages (from-to)	664-669
Journal	Journal of Materials Chemistry
Volume	17
Issue number	7
Publication status	Published - 2007
MoE publication type	A1 Journal article-refereed

Cite this

@article{f1f726b151634dfa87e9e6fade96761d,

title = "Atomic layer deposition of polyimide thin films",

author = "Matti Putkonen and Jenni Harjuoja and Timo Sajavaara and Lauri Niinist{\"o}",

year = "2007",

language = "English",

volume = "17",

pages = "664--669",

journal = "Journal of Materials Chemistry",

issn = "0959-9428",

number = "7",

}