Atomic layer deposition of polyimide thin films

Matti Putkonen, Jenni Harjuoja, Timo Sajavaara, Lauri Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    102 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)664-669
    JournalJournal of Materials Chemistry
    Volume17
    Issue number7
    Publication statusPublished - 2007
    MoE publication typeA1 Journal article-refereed

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