Atomic layer deposition of piezoelectric aluminum nitride thin films

Research output: Contribution to conferencePosterScientific

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Atomic layer deposition of piezoelectric aluminum nitride thin films. / Österlund, Elmeri; Seppänen, Heli; Paulasto-Kröckel, Mervi.

2019. Poster session presented at International Workshop on PiezoMEMS, Lausanne, Switzerland.

Research output: Contribution to conferencePosterScientific

Harvard

Österlund, E, Seppänen, H & Paulasto-Kröckel, M 2019, 'Atomic layer deposition of piezoelectric aluminum nitride thin films' International Workshop on PiezoMEMS, Lausanne, Switzerland, 14/07/2019 - 19/07/2019, .

APA

Österlund, E., Seppänen, H., & Paulasto-Kröckel, M. (2019). Atomic layer deposition of piezoelectric aluminum nitride thin films. Poster session presented at International Workshop on PiezoMEMS, Lausanne, Switzerland.

Vancouver

Österlund E, Seppänen H, Paulasto-Kröckel M. Atomic layer deposition of piezoelectric aluminum nitride thin films. 2019. Poster session presented at International Workshop on PiezoMEMS, Lausanne, Switzerland.

Author

Österlund, Elmeri ; Seppänen, Heli ; Paulasto-Kröckel, Mervi. / Atomic layer deposition of piezoelectric aluminum nitride thin films. Poster session presented at International Workshop on PiezoMEMS, Lausanne, Switzerland.

Bibtex - Download

@conference{fa3f083d9b4345779d5141ce20468ead,
title = "Atomic layer deposition of piezoelectric aluminum nitride thin films",
author = "Elmeri {\"O}sterlund and Heli Sepp{\"a}nen and Mervi Paulasto-Kr{\"o}ckel",
year = "2019",
month = "7",
day = "16",
language = "English",
note = "International Workshop on PiezoMEMS, IWPM ; Conference date: 14-07-2019 Through 19-07-2019",
url = "https://lausanne2019.org",

}

RIS - Download

TY - CONF

T1 - Atomic layer deposition of piezoelectric aluminum nitride thin films

AU - Österlund, Elmeri

AU - Seppänen, Heli

AU - Paulasto-Kröckel, Mervi

PY - 2019/7/16

Y1 - 2019/7/16

M3 - Poster

ER -

ID: 35760203