Atomic layer deposition of piezoelectric aluminum nitride thin films

Research output: Contribution to conferencePosterScientific

Original languageEnglish
Publication statusPublished - 16 Jul 2019
MoE publication typeNot Eligible
EventInternational Workshop on PiezoMEMS - Lausanne, Switzerland
Duration: 14 Jul 201919 Jul 2019
Conference number: 7
https://lausanne2019.org

Workshop

WorkshopInternational Workshop on PiezoMEMS
Abbreviated titleIWPM
CountrySwitzerland
CityLausanne
Period14/07/201919/07/2019
Internet address

Equipment

  • Cite this

    Österlund, E., Seppänen, H., & Paulasto-Kröckel, M. (2019). Atomic layer deposition of piezoelectric aluminum nitride thin films. Poster session presented at International Workshop on PiezoMEMS, Lausanne, Switzerland.