Atomic layer deposition of piezoelectric aluminum nitride thin films

Research output: Contribution to conference › Poster › Scientific

Original language	English
Publication status	Published - 16 Jul 2019
MoE publication type	Not Eligible
Event	International Workshop on PiezoMEMS - Lausanne, Switzerland Duration: 14 Jul 2019 → 19 Jul 2019 Conference number: 7 https://lausanne2019.org

Workshop	International Workshop on PiezoMEMS
Abbreviated title	IWPM
Country/Territory	Switzerland
City	Lausanne
Period	14/07/2019 → 19/07/2019
Internet address	https://lausanne2019.org

OpenUrl availability

@conference{fa3f083d9b4345779d5141ce20468ead,

title = "Atomic layer deposition of piezoelectric aluminum nitride thin films",

author = "Elmeri {\"O}sterlund and Heli Sepp{\"a}nen and Mervi Paulasto-Kr{\"o}ckel",

year = "2019",

month = jul,

day = "16",

language = "English",

note = "International Workshop on PiezoMEMS, IWPM ; Conference date: 14-07-2019 Through 19-07-2019",

url = "https://lausanne2019.org",

}