Atomic layer deposition of PbZrO3 thin films

Jenni Harjuoja, Samuli Väyrynen, Matti Putkonen, Lauri Niinistö, Eero Rauhala

    Research output: Contribution to journalArticleScientificpeer-review

    15 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)5228-5232
    JournalApplied Surface Science
    Volume253
    Issue number12
    Publication statusPublished - 2007
    MoE publication typeA1 Journal article-refereed

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