Atomic layer deposition of niobium nitride thin films

Ville Rontu

Department of Chemistry and Materials Science

Research output: Thesis › Master's thesis

Original language	English
Publisher	Aalto University
Publication status	Published - 2014
MoE publication type	G2 Master's thesis, polytechnic Master's thesis

Access to Document

https://aaltodoc.aalto.fi/handle/123456789/14667

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OtaNano
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Aalto University
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OtaNano
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School of Chemical Engineering
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