Atomic layer deposition of molybdenum nitride from bis(tert-butylimido)- bis(dimethylamido)molybdenum and ammonia onto several types of substrate materials with equal growth per cycle

V. Miikkulainen; Mika Suvanto; T.A. Pakkanen

doi:10.1021/cm0620279

Atomic layer deposition of molybdenum nitride from bis(tert-butylimido)- bis(dimethylamido)molybdenum and ammonia onto several types of substrate materials with equal growth per cycle

V. Miikkulainen, Mika Suvanto, T.A. Pakkanen

Not published at Aalto University

University of Joensuu

Research output: Contribution to journal › Article › Scientific › peer-review

44 Citations (Scopus)

Original language	English
Journal	Chemistry of Materials
Volume	19
Issue number	2
DOIs	https://doi.org/10.1021/cm0620279
Publication status	Published - 2007
MoE publication type	A1 Journal article-refereed

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10.1021/cm0620279

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AU - Pakkanen, T.A.

PY - 2007

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Atomic layer deposition of molybdenum nitride from bis(tert-butylimido)- bis(dimethylamido)molybdenum and ammonia onto several types of substrate materials with equal growth per cycle

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