Atomic layer deposition of molybdenum nitride from bis(tert-butylimido)- bis(dimethylamido)molybdenum and ammonia onto several types of substrate materials with equal growth per cycle

V. Miikkulainen, Mika Suvanto, T.A. Pakkanen

Research output: Contribution to journalArticleScientificpeer-review

30 Citations (Scopus)
Original languageEnglish
JournalChemistry of Materials
Volume19
Issue number2
DOIs
Publication statusPublished - 2007
MoE publication typeA1 Journal article-refereed

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