Atomic layer deposition of metal fluorides through oxide chemistry

Matti Putkonen, A Szeghalmi, E Pippel, Mato Knez

    Research output: Contribution to journalArticleScientificpeer-review

    19 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)14461-14465
    JournalJournal of Materials Chemistry
    Volume21
    DOIs
    Publication statusPublished - 2011
    MoE publication typeA1 Journal article-refereed

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