Atomic layer deposition of LixTiyOz thin films

V. Miikkulainen, O. Nilsen, Mikko Laitinen, Timo Sajavaara, H. Fjellvåg

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title = "Atomic layer deposition of LixTiyOz thin films",

author = "V. Miikkulainen and O. Nilsen and Mikko Laitinen and Timo Sajavaara and H. Fjellv{\aa}g",

year = "2013",

doi = "10.1039/c3ra40745d",

language = "English",

journal = "RSC Advances",

issn = "2046-2069",

publisher = "Royal Society of Chemistry",

}

TY - JOUR

T1 - Atomic layer deposition of LixTiyOz thin films

AU - Miikkulainen, V.

AU - Nilsen, O.

AU - Laitinen, Mikko

AU - Sajavaara, Timo

AU - Fjellvåg, H.

PY - 2013

Y1 - 2013

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DO - 10.1039/c3ra40745d

M3 - Article

SN - 2046-2069

JO - RSC Advances

JF - RSC Advances

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