Atomic layer deposition of LixTiyOz thin films

V. Miikkulainen, O. Nilsen, Mikko Laitinen, Timo Sajavaara, H. Fjellvåg

Research output: Contribution to journalArticleScientificpeer-review

38 Citations (Scopus)
Original languageEnglish
JournalRSC Advances
DOIs
Publication statusPublished - 2013
MoE publication typeA1 Journal article-refereed

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