Atomic Layer Deposition of Lithium Phosphorus Oxynitride

Mikko Nisula, Yohei Shindo, Hideyuki Koga, Maarit Karppinen

    Research output: Contribution to journalArticleScientificpeer-review

    74 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)6987-6993
    JournalChemistry of Materials
    Volume27
    Issue number20
    DOIs
    Publication statusPublished - 2015
    MoE publication typeA1 Journal article-refereed

    Cite this