Atomic layer deposition of lithium containing thin films

Titta Aaltonen, Mari Alnes, Matti Putkonen, Ola Nilsen, Helmer Fjellvåg

    Research output: Working paperProfessional

    63 Citations (Scopus)
    Original languageEnglish
    Publication statusPublished - 2009
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameBaltic ALD 2009, Uppsala, Sweden. 15-16.6.2009

    Cite this

    Aaltonen, T., Alnes, M., Putkonen, M., Nilsen, O., & Fjellvåg, H. (2009). Atomic layer deposition of lithium containing thin films. (Baltic ALD 2009, Uppsala, Sweden. 15-16.6.2009).